Dr. Axel Berthold Profile

Dr. Axel Berthold

at Fraunhofer-IZFP

SPIE Involvement:

Conference Program Committee | Author

Publications (8)

PROCEEDINGS ARTICLE | April 10, 2007

X-ray detectors for NDE applications

Proc. SPIE. 6530, Sensor Systems and Networks: Phenomena, Technology, and Applications for NDE and Health Monitoring 2007

KEYWORDS: Gallium arsenide, Sensors, Americium, Silicon, Photons, X-rays, PIN photodiodes, Absorption, X-ray detectors, Semiconducting wafers

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PROCEEDINGS ARTICLE | March 30, 2006

New trends in NDE and health monitoring

Proc. SPIE. 6179, Advanced Sensor Technologies for Nondestructive Evaluation and Structural Health Monitoring II

KEYWORDS: Nondestructive evaluation, Sensors, Inspection, Ultrasonics, Transducers, Electronics, Phased arrays, Signal processing, Sensor networks, Acoustics

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PROCEEDINGS ARTICLE | May 9, 2005

Sensor modules for structural health monitoring and reliability of components

Proc. SPIE. 5770, Advanced Sensor Technologies for Nondestructive Evaluation and Structural Health Monitoring

KEYWORDS: Structural health monitoring, Sensors, Signal processing, Nondestructive evaluation, Inspection, Reliability, Safety, Data communications, Digital signal processing, Wind energy

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PROCEEDINGS ARTICLE | May 9, 2005

Materials investigation of gallium arsenide for direct converting energy sensitive x-ray detectors

Proc. SPIE. 5770, Advanced Sensor Technologies for Nondestructive Evaluation and Structural Health Monitoring

KEYWORDS: Gallium arsenide, Sensors, Americium, Silicon, Photons, X-rays, PIN photodiodes, Absorption, X-ray detectors, Semiconducting wafers

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PROCEEDINGS ARTICLE | August 18, 2000

Backwafer optical lithography and wafer distortion in substrate transfer technologies

Proc. SPIE. 4181, Challenges in Process Integration and Device Technology

KEYWORDS: Semiconducting wafers, Overlay metrology, Optical alignment, Mirrors, Optical lithography, Silicon, Lithography

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PROCEEDINGS ARTICLE | July 20, 1998

Micromachined wet cell for a Love-wave liquid sensor

Proc. SPIE. 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS

KEYWORDS: Liquids, Sensors, Silicon, Semiconducting wafers, Photomasks, Etching, Acoustics, Wave propagation, Transducers, Aluminum

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PROCEEDINGS ARTICLE | July 20, 1998

Low-temperature quartz-to-silicon bonding for SAW applications

Proc. SPIE. 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS

KEYWORDS: Silicon, Semiconducting wafers, Quartz, Silicon films, Thin films, Sensors, Acoustics, Etching, Thin film devices, Metals

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PROCEEDINGS ARTICLE | September 5, 1997

Influence of processes and selective bonding technology

Proc. SPIE. 3223, Micromachining and Microfabrication Process Technology III

KEYWORDS: Chemical vapor deposition, Low pressure chemical vapor deposition, Surface roughness, Temperature metrology, Plasma enhanced chemical vapor deposition, Oxides, Silicon

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Showing 5 of 8 publications

Conference Committee Involvement (3)

Smart Sensor Phenomena, Technology, Networks, and Systems

10 March 2008 | San Diego, California, United States

Sensor Systems and Networks: Phenomena, Technology and Applications for NDE and Health Monitoring

19 March 2007 | San Diego, California, United States

Advanced Sensor Technologies for NDE and Structural Health Monitoring II

1 March 2006 | San Diego, CA, United States

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