Dr. Axel Schindler
at Scia Systems GmbH
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 27 August 2015
Proc. SPIE. 9575, Optical Manufacturing and Testing XI
KEYWORDS: Polishing, Silica, Calibration, Etching, Silicon, Surface roughness, Atomic force microscopy, Ion beams, Measurement devices, Reactive ion etching

Proceedings Article | 25 April 2006
Proc. SPIE. 6187, Photon Management II
KEYWORDS: Diffraction, Mirrors, Multilayers, Femtosecond phenomena, Silica, Reflection, Sensors, Sapphire lasers, Hybrid fiber optics, Diffraction gratings

Proceedings Article | 20 October 2005
Proc. SPIE. 5965, Optical Fabrication, Testing, and Metrology II
KEYWORDS: Mirrors, Crystals, Tungsten, Silicon, Synchrotron radiation, Silicon carbide, Zerodur, Prototyping, Surface finishing, Chemical mechanical planarization

Proceedings Article | 17 September 2005
Proc. SPIE. 5921, Advances in Metrology for X-Ray and EUV Optics
KEYWORDS: Optical components, Mirrors, Metrology, Nano opto mechanical systems, Ocean optics, Ion beams, Spatial resolution, Optics manufacturing, Ion beam finishing, Surface finishing

Proceedings Article | 9 May 2005
Proc. SPIE. 5768, Health Monitoring and Smart Nondestructive Evaluation of Structural and Biological Systems IV
KEYWORDS: Point spread functions, Microscopy, Interfaces, Silicon, Nondestructive evaluation, Ultrasonics, Transducers, Acoustics, Semiconducting wafers, Wafer bonding

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