Dr. Ayad Ghannam
at 3DiS Technologies
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 16 April 2011
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Microelectromechanical systems, Gold, Etching, Metals, Copper, Photoresist materials, Plasma etching, Photoresist processing, Semiconducting wafers, Electroplating

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