Dr. Ayelet Pnueli
Senior Physicist at Applied Materials Inc
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | May 24, 2004
Proc. SPIE. 5375, Metrology, Inspection, and Process Control for Microlithography XVIII
KEYWORDS: Semiconductors, Metrology, Optical lithography, Silver, Inspection, 3D modeling, Scanning electron microscopy, Monte Carlo methods, 3D metrology, Process control

PROCEEDINGS ARTICLE | May 24, 2004
Proc. SPIE. 5375, Metrology, Inspection, and Process Control for Microlithography XVIII
KEYWORDS: Signal to noise ratio, Metrology, Inspection, Image resolution, Image quality, Process control, Image enhancement, Spatial resolution, Critical dimension metrology, Semiconducting wafers

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