Dr. Ayse Akbalik
at CEA-LETI
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 24 March 2009 Paper
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Thin films, Refractive index, Metrology, Optical lithography, Polymers, Spectroscopy, Inspection, Process control, Polymer thin films, Current controlled current source

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