Ayumi Doi
at Hitachi High-Tech Corp
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 27 April 2023 Presentation + Paper
Wei Sun, Ayumi Doi, Miki Isawa, Victor Vega Gonzalez, Zsolt Tokei, Gian Lorusso
Proceedings Volume 12496, 124961V (2023) https://doi.org/10.1117/12.2656471
KEYWORDS: Transmission electron microscopy, Semiconducting wafers, Metrology, Etching, Monte Carlo methods, Critical dimension metrology, Calibration, Wafer bonding, Signal intensity, Optical lithography

Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Makoto Suzuki, Ayumi Doi, Aoi Yamauchi, Jong-Hyun Seo, Changhwan Lee, Byoungho Lee, Daisuke Bizen
Proceedings Volume 11611, 116112Q (2021) https://doi.org/10.1117/12.2583623

Proceedings Article | 26 March 2019 Presentation
Proceedings Volume 10959, 1095919 (2019) https://doi.org/10.1117/12.2514944
KEYWORDS: 3D metrology, Scanning electron microscopy, Integrated circuits, Metrology, 3D modeling, Sensors, Model-based design, Cadmium sulfide, Inspection, Photomicroscopy

Proceedings Article | 13 March 2018 Presentation + Paper
Makoto Suzuki, Toshimasa Kameda, Ayumi Doi, Sergey Borisov, Sergey Babin
Proceedings Volume 10585, 1058517 (2018) https://doi.org/10.1117/12.2301383
KEYWORDS: Scanning electron microscopy, Monte Carlo methods, Scattering, Sensors, Diffraction, Copper, Computer simulations

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