Ayumi Doi
at Hitachi High-Tech Science Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Metrology, Sensors, Inspection, 3D modeling, Scanning electron microscopy, 3D metrology, Integrated circuits, Cadmium sulfide, Photomicroscopy, Model-based design

Proceedings Article | 13 March 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Diffraction, Scattering, Sensors, Copper, Computer simulations, Scanning electron microscopy, Monte Carlo methods

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