Dr. Azalia Krasnoperova
Senior Engineer at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (25)

Proceedings Article | 31 March 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Lithography, Optical lithography, 3D modeling, Monte Carlo methods, Photomasks, Directed self assembly, Computational lithography, Critical dimension metrology, Photoresist processing, Instrument modeling

Proceedings Article | 16 March 2010
Proc. SPIE. 7640, Optical Microlithography XXIII
KEYWORDS: Lithography, Diffractive optical elements, Metals, Scanning electron microscopy, Photomasks, Source mask optimization, Optical proximity correction, Line edge roughness, Semiconducting wafers, Resolution enhancement technologies

Proceedings Article | 4 March 2010
Proc. SPIE. 7640, Optical Microlithography XXIII
KEYWORDS: Lithography, Metrology, Data modeling, Calibration, Image processing, Computer simulations, Optical proximity correction, Photoresist processing, Statistical modeling, Process modeling

Proceedings Article | 16 March 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Lithography, Diffraction, Optical lithography, Lithographic illumination, Manufacturing, Printing, Photomasks, Source mask optimization, Semiconducting wafers, Resolution enhancement technologies

Proceedings Article | 16 March 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Lithography, Computer simulations, Photomasks, Optical proximity correction, Critical dimension metrology, Algorithm development, Photoresist processing, Semiconducting wafers, Tolerancing, Yield improvement

Proceedings Article | 16 March 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Lithography, Logic, Optical lithography, Etching, Metals, Printing, Photomasks, Double patterning technology, Tolerancing, Resolution enhancement technologies

Showing 5 of 25 publications
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