Dr. Azat M. Latypov
Senior Member of Technical Staff at Siemens Digital Industries Software Inc
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Publications (20)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11609, Extreme Ultraviolet (EUV) Lithography XII

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11323, Extreme Ultraviolet (EUV) Lithography XI
KEYWORDS: Stochastic processes, Extreme ultraviolet lithography, Photons, Photoresist processing, Failure analysis, Extreme ultraviolet, Calibration, Statistical analysis, Data modeling, Semiconducting wafers

Proceedings Article | 19 March 2018 Presentation + Paper
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Line edge roughness, Stochastic processes, Calibration, Edge roughness, Extreme ultraviolet lithography, Extreme ultraviolet, Metals, Photoresist materials, Absorption, Monte Carlo methods

Proceedings Article | 27 March 2017 Presentation + Paper
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Thermal effects, Lithography, Molecules, Molecular self-assembly, Annealing, Integrated circuits, Applied physics, Directed self assembly, Fluctuations and noise, Polymers

Proceedings Article | 27 March 2017 Presentation + Paper
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Monte Carlo methods, Stochastic processes, Line edge roughness, Extreme ultraviolet lithography, Extreme ultraviolet, Photoresist materials, EUV optics, Lithography, Chemically amplified resists, Calibration, Edge roughness, Photoresist processing

Showing 5 of 20 publications
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