Azrul Azlan Hamzah
at Univ Kebangsaan Malaysia
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 4 January 2006
Proc. SPIE. 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
KEYWORDS: Oxides, Optical microscopes, Data modeling, Etching, Glasses, Silicon, Diffusion, Photoresist materials, Deep reactive ion etching, HF etching

Proceedings Article | 29 December 2005
Proc. SPIE. 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
KEYWORDS: Oxides, Multilayers, Etching, Glasses, Particles, Silicon, Scanning electron microscopy, Profilometers, Photomicroscopy, HF etching

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top