Dr. Babak Mokaberi
Principal Process Engineer at SAMSUNG Austin Semiconductor LLC
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Semiconductors, Modeling, Metrology, Data modeling, Computing systems, Control systems, Time metrology, Process control, Semiconducting wafers, Overlay metrology

PROCEEDINGS ARTICLE | March 8, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Target detection, Metrology, Logic, Scanners, Time metrology, Finite element methods, High volume manufacturing, Critical dimension metrology, Semiconducting wafers, Yield improvement

PROCEEDINGS ARTICLE | March 8, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Semiconductors, Lithography, Metrology, Lithium, Data modeling, Computing systems, Time metrology, Semiconducting wafers, Systems modeling, Overlay metrology

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