Dr. Babak Mozooni
at ASML Netherlands B.V.
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Proceedings Volume 11611, 116112U (2021) https://doi.org/10.1117/12.2583737
KEYWORDS: Overlay metrology, Optical metrology, Metrology, Lithography, High volume manufacturing, Etching, Diffraction

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11611, 116110V (2021) https://doi.org/10.1117/12.2583416

Proceedings Article | 20 March 2020 Paper
Proceedings Volume 11325, 1132522 (2020) https://doi.org/10.1117/12.2553054
KEYWORDS: Optical metrology, Overlay metrology, Semiconducting wafers, Signal processing, Metrology, Machine learning, Image processing, Optical signal processing, Optics manufacturing

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