Dr. Badariah Bais
at
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | July 1, 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Microelectromechanical systems, Optical lithography, Capacitors, Electrodes, Glasses, Silicon, Capacitance, Wafer bonding, Device simulation, Bulk micromachining

PROCEEDINGS ARTICLE | April 2, 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Microelectromechanical systems, Optical lithography, Electrodes, Glasses, Silicon, Capacitance, Deep reactive ion etching, Reactive ion etching, Semiconducting wafers, Wafer bonding

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