Dr. Bai Xu
Senior Scientist at SUNY/Univ at Albany
SPIE Involvement:
Author
Publications (29)

SPIE Journal Paper | April 1, 2006
JM3 Vol. 5 Issue 02
KEYWORDS: Ultraviolet radiation, Fourier transforms, Microfabrication, Microfluidics, Silicon, Biosensors, Wafer bonding, Semiconducting wafers, Roads, Polymers

SPIE Journal Paper | April 1, 2006
JM3 Vol. 5 Issue 02
KEYWORDS: Zinc oxide, Actuators, Semiconducting wafers, Ultrasonics, Scanning probe microscopy, Etching, Electrodes, Oxides, Imaging systems, Silicon

PROCEEDINGS ARTICLE | February 10, 2006
Proc. SPIE. 6128, Photonic Crystal Materials and Devices IV
KEYWORDS: Optical filters, Refractive index, Electrodes, Silicon, Interference filters, Reflectivity, Aluminum, Semiconducting wafers, Optical microcavities, Bandpass filters

PROCEEDINGS ARTICLE | January 6, 2006
Proc. SPIE. 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
KEYWORDS: Microelectromechanical systems, Sensors, Polymers, Interfaces, Silicon, CMOS technology, Semiconducting wafers, System on a chip, Wafer bonding, Standards development

SPIE Journal Paper | October 1, 2005
JM3 Vol. 4 Issue 04
KEYWORDS: Microopto electromechanical systems, Prototyping, Electrodes, Semiconducting wafers, Microelectromechanical systems, Diffraction gratings, Electromechanical design, Optical fabrication, Gold, Polymers

PROCEEDINGS ARTICLE | May 9, 2005
Proc. SPIE. 5766, Testing, Reliability, and Application of Micro- and Nano-Material Systems III
KEYWORDS: Actuators, Etching, Electrodes, Metals, Silicon, Ultrasonics, Photomasks, Scanning probe microscopy, Zinc oxide, Semiconducting wafers

Showing 5 of 29 publications
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