Dr. Bangtao Chen
at Institute of Microelectronics
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 5 January 2009
Proc. SPIE. 7269, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV
KEYWORDS: Amorphous silicon, Refractive index, Biomedical optics, Etching, Crystals, Ions, Silicon, Plasma enhanced chemical vapor deposition, Silicon carbide, Semiconducting wafers

Proceedings Article | 30 December 2008
Proc. SPIE. 7270, Biomedical Applications of Micro- and Nanoengineering IV and Complex Systems
KEYWORDS: Etching, Skin, Silicon, Diffusion, Scanning electron microscopy, Photoresist materials, Photomasks, Deep reactive ion etching, Reactive ion etching, In vitro testing

Proceedings Article | 30 December 2008
Proc. SPIE. 7269, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV
KEYWORDS: Microelectromechanical systems, Etching, Argon, Glasses, Photoresist materials, Photomasks, Plasma enhanced chemical vapor deposition, Wet etching, Silicon carbide, Semiconducting wafers

Proceedings Article | 20 December 2006
Proc. SPIE. 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
KEYWORDS: Microelectromechanical systems, Etching, Ions, Silicon, Gases, Plasma enhanced chemical vapor deposition, Wet etching, Stem cells, Semiconducting wafers, Plasma

Proceedings Article | 20 December 2006
Proc. SPIE. 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
KEYWORDS: Fabrication, Nanotechnology, Microfluidics, Glasses, Silicon, Dielectrophoresis, Photoresist materials, Semiconducting wafers, Adhesives, Wafer bonding

Proceedings Article | 19 January 2006
Proc. SPIE. 6036, BioMEMS and Nanotechnology II
KEYWORDS: Etching, Silicon, Photoresist materials, Photomasks, Plasma etching, Reactive ion etching, Thermoelectric materials, Semiconducting wafers, Nanolithography, Oxidation

Showing 5 of 7 publications
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