Dr. Banqiu Wu
Sr. Dir/Mask Clean at Applied Materials Inc
SPIE Involvement:
Publications (15)

Proceedings Article | 9 September 2013 Paper
Banqiu Wu, Ajay Kumar
Proceedings Volume 8880, 888004 (2013) https://doi.org/10.1117/12.2030487
KEYWORDS: Line edge roughness, Line width roughness, Photomasks, Photoresist processing, Lithography, Plasma, Edge roughness, Extreme ultraviolet lithography, Etching, Transistors

SPIE Journal Paper | 22 March 2013
Banqiu Wu, Ajay Kumar, Madhavi Chandrachood, Amitabh Sabharwal
JM3, Vol. 12, Issue 02, 021007, (March 2013) https://doi.org/10.1117/12.10.1117/1.JMM.12.2.021007
KEYWORDS: Etching, Extreme ultraviolet lithography, Photomasks, Extreme ultraviolet, Multilayers, Line width roughness, Inspection, Photoresist processing, Plasma, Silicon

Proceedings Article | 14 October 2011 Paper
John Whang, Madhavi Chandrachood, Emily Gallagher, Tom Faure, Michael Grimbergen, Shaun Crawford, Keven Yu, T. Y .B Leung, Richard Wistrom, Amitabh Sabharwal, Jeff Chen, Banqiu Wu
Proceedings Volume 8166, 81661W (2011) https://doi.org/10.1117/12.898815
KEYWORDS: Etching, Photomasks, Extreme ultraviolet, Ruthenium, Line edge roughness, Multilayers, Binary data, Manufacturing, Extreme ultraviolet lithography, Tantalum

Proceedings Article | 19 May 2008 Paper
Roman Gouk, Jason Jeon, Fred Li, James Papanu, Banqiu Wu, Rao Yalamanchili
Proceedings Volume 7028, 702808 (2008) https://doi.org/10.1117/12.793017
KEYWORDS: Particles, Nondestructive evaluation, Photomasks, Mask cleaning, Chemistry, Chromium, Scanning electron microscopy, Latex, Inspection, Liquids

Proceedings Article | 2 May 2008 Paper
Banqiu Wu, Ajay Kumar
Proceedings Volume 6792, 67920E (2008) https://doi.org/10.1117/12.798593
KEYWORDS: Air contamination, Photomasks, Oxygen, Sulfur, Crystals, Lithography, Seaborgium, Pellicles, Deep ultraviolet, Adsorption

Showing 5 of 15 publications
Conference Committee Involvement (11)
Photomask Technology
27 September 2021 | Online Only, United States
Photomask Technology
21 September 2020 | Online Only, California, United States
Photomask Technology
16 September 2019 | Monterey, California, United States
Photomask Technology
17 September 2018 | Monterey, California, United States
Photomask Technology
11 September 2017 | Monterey, California, United States
Showing 5 of 11 Conference Committees
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