Dr. Barry J. Gallacher
at Newcastle Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | January 23, 2006
Proc. SPIE. 6113, MEMS/MOEMS Components and Their Applications III
KEYWORDS: Microelectromechanical systems, Nanotechnology, MATLAB, Oscillators, Resonators, Sensors, Electrodes, Simulink, Gyroscopes, Microrings

PROCEEDINGS ARTICLE | August 17, 2004
Proc. SPIE. 5458, Optical Micro- and Nanometrology in Manufacturing Technology
KEYWORDS: Microelectromechanical systems, Wafer-level optics, Sensors, Calibration, Silicon, Laser ablation, Profilometers, Objectives, Gyroscopes, Semiconducting wafers

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