Dr. Barry Lai Profile

Dr. Barry Lai

Physicist at Argonne National Laboratory

SPIE Involvement:

Conference Chair | Author | Editor

Publications (34)

PROCEEDINGS ARTICLE | August 23, 2017

Design and test of precision vertical and horizontal linear nanopositioning flexure stages with centimeter-level travel range for x-ray instrumentation

Proc. SPIE. 10371, Optomechanical Engineering 2017

KEYWORDS: X-ray optics, X-rays, Motion controllers, Spatial resolution, Hard x-rays, Imaging spectroscopy, Spectroscopes, Error analysis, X-ray sources, Mechanical engineering

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SPIE Conference Volume | October 2, 2015

X-Ray Nanoimaging: Instruments and Methods II

PROCEEDINGS ARTICLE | September 18, 2015

Stacking multiple zone plates for efficient hard x-ray focusing at the Advanced Photon Source

Proc. SPIE. 9592, X-Ray Nanoimaging: Instruments and Methods II

KEYWORDS: Zone plates, X-rays, Near field, Energy efficiency, Hard x-rays, Near field optics, X-ray optics, Gold, Neodymium, Charge-coupled devices

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SPIE Conference Volume | October 14, 2013

X-Ray Nanoimaging: Instruments and Methods

PROCEEDINGS ARTICLE | September 26, 2013

A next-generation in-situ nanoprobe beamline for the Advanced Photon Source

Proc. SPIE. 8851, X-Ray Nanoimaging: Instruments and Methods

KEYWORDS: X-rays, Solar energy, Mirrors, Hard x-rays, X-ray optics, Nanoprobes, Diffraction, Spatial resolution, X-ray imaging, X-ray fluorescence spectroscopy

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PROCEEDINGS ARTICLE | September 26, 2013

Sub-100-nm 3D-elemental mapping of frozen-hydrated cells using the bionanoprobe

Proc. SPIE. 8851, X-Ray Nanoimaging: Instruments and Methods

KEYWORDS: Luminescence, Cryogenics, Spatial resolution, Tomography, Distortion, X-ray microscopy, Liquids, X-rays, Hard x-rays, 3D image processing

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PROCEEDINGS ARTICLE | September 18, 2013

Optomechanical design of a modular K-B mirror mount system for x-ray microfocusing at the advanced photon source

Proc. SPIE. 8836, Optomechanical Engineering 2013

KEYWORDS: Mirror mounts, Mirrors, X-rays, 3D modeling, Hard x-rays, X-ray optics, Optomechanical design, Prototyping, Synchrotron radiation, Optical testing

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PROCEEDINGS ARTICLE | September 28, 2011

Progress on single crystal beryllium windows

Proc. SPIE. 8139, Advances in X-Ray/EUV Optics and Components VI

KEYWORDS: Beryllium, X-rays, Crystals, X-ray imaging, Polishing, Sensors, Coherence (optics), Near field optics, Charge-coupled devices, Laser crystals

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PROCEEDINGS ARTICLE | October 6, 2010

Beam coherence and x-ray windows

Proc. SPIE. 7802, Advances in X-Ray/EUV Optics and Components V

KEYWORDS: Beryllium, Polishing, X-rays, Crystals, X-ray imaging, Surface finishing, Coherence imaging, Surface roughness, Laser cutting, X-ray diffraction

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PROCEEDINGS ARTICLE | September 13, 2005

Design and test of a differential scanning stage system for a x-ray nanoprobe instrument

Proc. SPIE. 5877, Optomechanics 2005

KEYWORDS: Zone plates, Control systems, X-rays, X-ray optics, Nanoprobes, Computer programming, Prototyping, Sensors, Hard x-rays, Data acquisition

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PROCEEDINGS ARTICLE | November 4, 2004

Tapered tilted linear zone plates for focusing hard x-rays

Proc. SPIE. 5539, Design and Microfabrication of Novel X-Ray Optics II

KEYWORDS: Zone plates, Data transmission, Hard x-rays, X-rays, Imaging spectroscopy, X-ray optics, X-ray diffraction, X-ray imaging, Gold, Lithography

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PROCEEDINGS ARTICLE | November 3, 2004

High spectral resolution Al2O3/B4C, SiC/Si, SiC/B4C, and SiC/C multilayer structures for the photon energies of 6 keV to 19 keV

Proc. SPIE. 5537, X-Ray Sources and Optics

KEYWORDS: Multilayers, Reflectivity, Monochromators, Spectral resolution, X-rays, Silicon, Optical testing, Sputter deposition, Beam splitters, X-ray characterization

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PROCEEDINGS ARTICLE | November 21, 2002

Near-field stacking of zone plates in the x-ray range

Proc. SPIE. 4783, Design and Microfabrication of Novel X-Ray Optics

KEYWORDS: Zone plates, X-rays, Diffraction, Hard x-rays, Energy efficiency, Near field, Spatial resolution, Near field optics, Manufacturing, Gold

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PROCEEDINGS ARTICLE | November 21, 2002

Progress in the fabrication of high-aspect-ratio zone plates by soft x-ray lithography

Proc. SPIE. 4783, Design and Microfabrication of Novel X-Ray Optics

KEYWORDS: Gold, Polymethylmethacrylate, Zone plates, X-rays, Hard x-rays, X-ray lithography, Electroplating, Scanning electron microscopy, Plating, Photomasks

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PROCEEDINGS ARTICLE | September 9, 2002

Enhancement of the vibration stability of a microdiffraction goniometer

Proc. SPIE. 4771, Optomechanical Design and Engineering 2002

KEYWORDS: X-rays, Finite element methods, Motion measurement, Synchrotrons, Kinematics, X-ray diffraction, Data acquisition, Vibrometry, Optical scanning systems, Analytical research

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PROCEEDINGS ARTICLE | December 13, 2001

X-ray microdiffraction study of martensite-retained austenite microstructures at the tip of a steel blade

Proc. SPIE. 4499, X-Ray Micro- and Nano-Focusing: Applications and Techniques II

KEYWORDS: X-rays, Diffraction, Sensors, X-ray diffraction, CCD image sensors, Heat treatments, Zone plates, X-ray detectors, Charge-coupled devices, Scattering

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PROCEEDINGS ARTICLE | January 5, 2001

X-ray zone plate fabrication using a focused ion beam

Proc. SPIE. 4145, Advances in X-Ray Optics

KEYWORDS: Zone plates, Ion beams, X-rays, Ions, Sputter deposition, Silicon, Transmission electron microscopy, Lithography, Photomasks, Gallium

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PROCEEDINGS ARTICLE | January 5, 2001

Characterization of the focal quality of micron-size beams from x-ray mirrors and zone plates

Proc. SPIE. 4145, Advances in X-Ray Optics

KEYWORDS: X-rays, Mirrors, Zone plates, X-ray optics, Luminescence, Silicon, Titanium, Nickel, X-ray characterization, Light sources

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PROCEEDINGS ARTICLE | November 16, 1999

Fabrication of Wolter I multilayer coated optics via electroforming: an update

Proc. SPIE. 3773, X-Ray Optics Design, Performance, and Applications

KEYWORDS: Multilayers, Mirrors, X-rays, Nickel, Reflectivity, Copper, Liquids, Nitrogen, Sputter deposition, Thin film coatings

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PROCEEDINGS ARTICLE | November 13, 1998

Performance of side-cooled high-heat-load mirrors

Proc. SPIE. 3447, Advances in Mirror Technology for Synchrotron X-Ray and Laser Applications

KEYWORDS: Mirrors, X-rays, Monochromators, Optical components, Copper, Silicon, Heat flux, Polishing, Synchrotrons, X-ray optics

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PROCEEDINGS ARTICLE | November 6, 1998

Advanced zone plate microfocusing optics

Proc. SPIE. 3449, X-Ray Microfocusing: Applications and Techniques

KEYWORDS: Zone plates, X-rays, X-ray optics, Spatial resolution, Diffraction, Optics manufacturing, X-ray lithography, Grazing incidence, Manufacturing, Hard x-rays

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PROCEEDINGS ARTICLE | November 6, 1998

Using x-ray microprobes for environmental research

Proc. SPIE. 3449, X-Ray Microfocusing: Applications and Techniques

KEYWORDS: Metals, X-rays, Interfaces, Soil contamination, Soil science, Fungi, Hard x-rays, X-ray fluorescence spectroscopy, Imaging spectroscopy, Zinc

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PROCEEDINGS ARTICLE | June 5, 1998

0.1-um high-aspect-ratio pattern replication and linewidth control

Proc. SPIE. 3331, Emerging Lithographic Technologies II

KEYWORDS: Gold, Photomasks, Reactive ion etching, X-rays, Electroplating, Polymethylmethacrylate, Etching, Plating, Photoresist materials, X-ray lithography

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PROCEEDINGS ARTICLE | December 11, 1997

Thermal management of masks for deep x-ray lithography

Proc. SPIE. 3151, High Heat Flux and Synchrotron Radiation Beamlines

KEYWORDS: Photomasks, Beryllium, X-rays, Silicon, Diamond, Silicon carbide, Distortion, Gold, X-ray lithography, Photoresist materials

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PROCEEDINGS ARTICLE | November 1, 1997

Supermirror fabrication via electroforming

Proc. SPIE. 3152, Materials, Manufacturing, and Measurement for Synchrotron Radiation Mirrors

KEYWORDS: Multilayers, X-rays, Mirrors, Atomic force microscopy, Gold, Nickel, Reflectivity, Sapphire, Radium, X-ray optics

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PROCEEDINGS ARTICLE | October 24, 1997

X-ray microtomography as a fast three-dimensional imaging technology using a CCD camera coupled with a CdWO4 single-crystal scintillator

Proc. SPIE. 3149, Developments in X-Ray Tomography

KEYWORDS: X-rays, Scintillators, Gold, CCD cameras, Microscopes, 3D image processing, X-ray imaging, 3D image reconstruction, Crystals, Reconstruction algorithms

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PROCEEDINGS ARTICLE | September 13, 1996

Fabrication of mm-wave undulator/linear accelerator cavities using deep x-ray lithography

Proc. SPIE. 2880, Microlithography and Metrology in Micromachining II

KEYWORDS: Polymethylmethacrylate, X-ray lithography, Photomasks, Copper, X-rays, Hard x-rays, Photoresist processing, Synchrotron radiation, Semiconducting wafers, Electroplating

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PROCEEDINGS ARTICLE | September 13, 1996

Beamline and exposure station for deep x-ray lithography at the advanced photon source

Proc. SPIE. 2880, Microlithography and Metrology in Micromachining II

KEYWORDS: X-rays, Mirrors, Scanners, X-ray lithography, Photomasks, Collimation, Polymethylmethacrylate, Synchrotron radiation, Absorption, Surface finishing

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PROCEEDINGS ARTICLE | September 25, 1995

Microfocusing optics for hard xrays fabricated by x-ray lithography

Proc. SPIE. 2516, X-Ray Microbeam Technology and Applications

KEYWORDS: Gold, Photoresist materials, X-ray lithography, X-rays, Photomasks, Lithography, Polymethylmethacrylate, Electroplating, Optical fabrication, Zone plates

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PROCEEDINGS ARTICLE | February 1, 1994

Material optimization for hard x-ray Fresnel zone plates

Proc. SPIE. 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II

KEYWORDS: Zone plates, Absorption, Hard x-rays, Lithography, Gold, Nickel, Phase shift keying, Beryllium, Aluminum, Phase shifts

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PROCEEDINGS ARTICLE | February 25, 1993

Absorption of undulator radiation in media

Proc. SPIE. 1739, High Heat Flux Engineering

KEYWORDS: Bessel functions, Beryllium, Heat flux, Thermal engineering, Absorption, Particle beams, Near field, Optical filters, Synchrotron radiation, Erbium

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PROCEEDINGS ARTICLE | January 20, 1993

Performance comparison of hard x-ray plates fabricated by two different methods

Proc. SPIE. 1740, Optics for High-Brightness Synchrotron Radiation Beamlines

KEYWORDS: Zone plates, X-rays, Spatial resolution, Synchrotron radiation, Hard x-rays, Energy efficiency, Lithography, Synchrotrons, Diffraction, Optical components

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