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Dr. Barton G. Lane
at Tokyo Electron America
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Publications (1)
Proceedings Article | 28 March 2017 Presentation + Paper
Global minimization line-edge roughness analysis of top down SEM images
Barton Lane, Chris Mack, Nasim Eibagi, Peter Ventzek
Proceedings Volume 10145, 101450Y (2017) https://doi.org/10.1117/12.2258035
KEYWORDS: Scanning electron microscopy, Line edge roughness, Edge detection, Image processing, Process control, Image analysis, Inspection, Distortion, Edge roughness, Error analysis, Fourier transforms, Statistical analysis, Line width roughness
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