Dr. Barton G. Lane
Member Technical Staff at Tokyo Electron America Inc
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Edge detection, Statistical analysis, Image processing, Error analysis, Inspection, Fourier transforms, Distortion, Image analysis, Scanning electron microscopy, Process control, Line width roughness, Line edge roughness, Edge roughness

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