Dr. Bartosz Bilski
Imaging Performance and Applications Scientist at Carl Zeiss SMT GmbH
SPIE Involvement:
Publications (12)

Proceedings Article | 1 December 2022 Presentation + Paper
Proceedings Volume 12292, 1229204 (2022) https://doi.org/10.1117/12.2645875
KEYWORDS: Projection systems, Optics manufacturing, Lithography, Extreme ultraviolet, EUV optics, Extreme ultraviolet lithography

SPIE Journal Paper | 21 April 2022
JM3, Vol. 21, Issue 02, 023801, (April 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.2.023801
KEYWORDS: Wavefronts, Zernike polynomials, Scanners, Extreme ultraviolet, Spherical lenses, Monochromatic aberrations, Mirrors, Extreme ultraviolet lithography, Lithography, Sensors

Proceedings Article | 28 September 2021 Presentation
Proceedings Volume 11854, 118540G (2021) https://doi.org/10.1117/12.2600965
KEYWORDS: Imaging systems, Extreme ultraviolet, Fiber optic illuminators, Transistors, Scanners, Optimization (mathematics), Mirrors, Metals, Extreme ultraviolet lithography

Proceedings Article | 18 November 2020 Presentation + Paper
Proceedings Volume 11517, 1151715 (2020) https://doi.org/10.1117/12.2572878
KEYWORDS: Wavefronts, Extreme ultraviolet lithography, Scanners, Extreme ultraviolet, Transistors, Multilayers, Mirrors

Proceedings Article | 29 August 2019 Paper
Proceedings Volume 11177, 111770I (2019) https://doi.org/10.1117/12.2536329
KEYWORDS: Lithography, Extreme ultraviolet, Projection systems, Diffraction, Extreme ultraviolet lithography, Scanners, EUV optics, Lithographic illumination, Projection lithography, Optical imaging, Computational lithography

Showing 5 of 12 publications
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