Dr. Bassam Shamoun
Engineering Principal at Intel Corp
SPIE Involvement:
Publications (10)

Proceedings Article | 1 May 2023 Presentation + Paper
B. Shamoun, Z. Alberti, I. Bucay, S. Ellis, M. Erickson, B. Liu, M. Chandramouli, A. Sowers, F. Abboud, G. Hochleitner, M. Tomandl, C. Klein, E. Platzgummer
Proceedings Volume 12497, 1249707 (2023) https://doi.org/10.1117/12.2657746
KEYWORDS: Line edge roughness, Lithography, Printing, Extreme ultraviolet lithography, Laser scattering, Analytic models, Beam diameter, Optical aberrations, Opacity, Manufacturing

Proceedings Article | 24 February 2021 Presentation + Paper
Bassam Shamoun, Mahesh Chandramouli, Bin Liu, Reid Juday, Igal Bucay, Andrew Sowers, Frank Abboud
Proceedings Volume 11610, 116100Q (2021) https://doi.org/10.1117/12.2586863
KEYWORDS: Photomasks, Extreme ultraviolet, Line edge roughness, Data conversion, Wafer manufacturing, Roads, Extreme ultraviolet lithography

Proceedings Article | 23 March 2020 Paper
Proceedings Volume 11324, 113240K (2020) https://doi.org/10.1117/12.2556552
KEYWORDS: Photomasks, Vestigial sideband modulation, Raster graphics, Lithography, Electrodes, Overlay metrology, Optical lithography, Manufacturing, Printing, Extreme ultraviolet

Proceedings Article | 15 October 2003 Paper
Juan Maldonado, Steven Coyle, Bassam Shamoun, Ming Yu, Timothy Thomas, Douglas Holmgren, Xiaolan Chen, B. DeVore, M. Scheinfein, Mark Gesley
Proceedings Volume 5220, (2003) https://doi.org/10.1117/12.512863
KEYWORDS: Photomasks, Lithography, Raster graphics, Electron beam lithography, Mask making, Modulation, Prototyping, Electron beams, Semiconducting wafers, Laser applications

Proceedings Article | 19 July 2000 Paper
Varoujan Chakarian, Charles Sauer, Bassam Shamoun, Frank Chilese, David Trost, Marek Zywno, Ulrich Hofmann, Robin Teitzel, Richard Prior, Frederick Raymond, Abe Ghanbari, Frank Abboud
Proceedings Volume 4066, (2000) https://doi.org/10.1117/12.392094
KEYWORDS: Photomasks, Lithography, Control systems, Electron beam lithography, Critical dimension metrology, Raster graphics, Reticles, Binary data, Line edge roughness, RGB color model

Showing 5 of 10 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top