In this paper achievements utilising Organic Vapor Phase Deposition (OVPD) are reviewed and presented together
with recent results. Organic thin films could be deposited with a high degree of accuracy and reproducibility. Organic
Light Emitting Diodes (OLEDs) were compared to devices manufactured with conventional techniques and showed
similar or even slightly better performance. The combination of OVPD with Close Coupled Showerhead (CCS)
technology results in manufacturing equipment with vast potential for cost effective manufacturing of OLED displays
commercially competitive to LCD.