Dr. Bayram Yenikaya
at Cadence
SPIE Involvement:
Author
Publications (13)

Proceedings Article | 24 March 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Lithography, Lithographic illumination, Databases, Manufacturing, Inspection, Photoresist materials, Computational lithography, Optical proximity correction, SRAF, Algorithm development, Tolerancing

Proceedings Article | 24 March 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Lithography, Optical lithography, Pattern recognition, Process control, Computational lithography, Optical proximity correction, SRAF, Yield improvement, Model-based design, 193nm lithography, Resolution enhancement technologies

Proceedings Article | 31 March 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Lithography, Sensors, Metals, Control systems, Image quality, Process control, Logic devices, Optical proximity correction, Nanoimprint lithography, Resolution enhancement technologies

Proceedings Article | 31 March 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Diffraction, Optical lithography, Data modeling, Calibration, 3D modeling, Photomasks, Optical proximity correction, SRAF, Chlorine, Semiconducting wafers

Proceedings Article | 23 September 2009
Proc. SPIE. 7488, Photomask Technology 2009
KEYWORDS: Printing, Photomasks, Optical proximity correction, SRAF, Optimization (mathematics), Semiconducting wafers, Systems modeling, Model-based design, Resolution enhancement technologies, Alternate lighting of surfaces

Proceedings Article | 11 May 2009
Proc. SPIE. 7379, Photomask and Next-Generation Lithography Mask Technology XVI
KEYWORDS: Lithography, Lithographic illumination, Electroluminescence, Printing, Photomasks, SRAF, Critical dimension metrology, Optimization (mathematics), Systems modeling, Model-based design

Showing 5 of 13 publications
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