Behnam Akhavan
at Univ of Sydney
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 22 December 2015
Proc. SPIE. 9668, Micro+Nano Materials, Devices, and Systems
KEYWORDS: Refractive index, Polymers, Ions, Nitrogen, Chemistry, Polymerization, Plasma enhanced chemical vapor deposition, Zirconium, Thin film deposition, Plasma systems, Polymer thin films, Plasma

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