Prof. Bei Yu
Assistant Professor at Chinese Univ of Hong Kong
SPIE Involvement:
Publications (19)

Proceedings Article | 20 March 2019 Presentation + Paper
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Convolutional neural networks, Metals, Neural networks, Design for manufacturing, Machine learning, Semiconductor manufacturing, Artificial intelligence, Charge-coupled devices, Convolution, Model-based design

SPIE Journal Paper | 24 August 2017
JM3 Vol. 16 Issue 03
KEYWORDS: Lithography, Neural networks, Convolution, Neurons, Machine learning, Photomasks, Performance modeling, Feature extraction, Convolutional neural networks, Sensors

SPIE Journal Paper | 14 June 2017
JM3 Vol. 16 Issue 02
KEYWORDS: Electron beam lithography, Extreme ultraviolet lithography, Computer programming, Lithography, Metals, Semiconductors, Directed self assembly, Manufacturing, Photomasks

Proceedings Article | 28 March 2017 Presentation + Paper
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Lithography, Convolutional neural networks, Data modeling, Sensors, Feature extraction, Neural networks, Design for manufacturing, Very large scale integration, Photomasks, Machine learning, Convolution, Neurons

SPIE Journal Paper | 21 October 2016
JM3 Vol. 15 Issue 04
KEYWORDS: Source mask optimization, Optical proximity correction, Data modeling, Lithography, Feature extraction, Principal component analysis, Model-based design, Performance modeling, Photomasks, Manufacturing

Showing 5 of 19 publications
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