Roberto Bellotti
at Istituto Nazionale di Ricerca Metrologica
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | August 27, 2014
Proc. SPIE. 9173, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII
KEYWORDS: Mirrors, Metrology, Interferometers, Sensors, Calibration, Error analysis, Atomic force microscopy, Head, Heterodyning, Signal detection

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