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Ben Ross
at Microconnex
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 9 May 2001 Paper
Direct write exposure and ablation of photoresist in fine scale interconnect circuits
William Beck, Jeff Strole, John Yarno, Thayer Hughes, Ben Ross
Proceedings Volume 4243, (2001) https://doi.org/10.1117/12.426675
KEYWORDS: Laser ablation, Etching, Plating, Wet etching, Pulsed laser operation, Plasma etching, Laser drilling, Flexible circuits, Photoresist materials, Laser stabilization
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