Dr. Benfeng Liu
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 20 February 2009
Proc. SPIE. 7279, Photonics and Optoelectronics Meetings (POEM) 2008: Optoelectronic Devices and Integration
KEYWORDS: Sputter deposition, Hydrogen, Absorption, Refractive index, Thin films, Amorphous silicon, Silicon films, Argon, Optical properties, Silicon

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