Dr. Benjamen M. Rathsack
Senior Director at Tokyo Electron America Inc
SPIE Involvement:
Senior status | Conference Program Committee | Author
Publications (28)

Proceedings Article | 20 March 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Optical lithography, Polymethylmethacrylate, Etching, Image processing, Manufacturing, Ecosystems, Line width roughness, Directed self assembly, Line edge roughness, Semiconducting wafers

Proceedings Article | 28 March 2014
Proc. SPIE. 9053, Design-Process-Technology Co-optimization for Manufacturability VIII
KEYWORDS: Lithography, Optical lithography, Visualization, Polymers, Metals, Manufacturing, Monte Carlo methods, Photomasks, Directed self assembly, Design for manufacturability

Proceedings Article | 27 March 2014
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Lithography, Polymethylmethacrylate, Etching, Manufacturing, Ecosystems, Directed self assembly, High volume manufacturing, Manufacturing equipment, Thin film coatings, Semiconducting wafers

Proceedings Article | 18 April 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Wafer-level optics, Reticles, Optical lithography, Inspection, Optical inspection, Wafer inspection, Directed self assembly, Epitaxy, Semiconducting wafers, Defect inspection

Proceedings Article | 29 March 2013
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Polymethylmethacrylate, Etching, Polymers, Materials processing, Manufacturing, Inspection, Ecosystems, Directed self assembly, Picosecond phenomena, Semiconducting wafers

Proceedings Article | 26 March 2013
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Lithography, Optical lithography, Polymethylmethacrylate, Etching, Silicon, Coating, Photoresist materials, Finite element methods, Directed self assembly, Picosecond phenomena

Showing 5 of 28 publications
Conference Committee Involvement (7)
Emerging Patterning Technologies 2017
27 February 2017 | San Jose, California, United States
Alternative Lithographic Technologies VIII
22 February 2016 | San Jose, California, United States
Alternative Lithographic Technologies VII
23 February 2015 | San Jose, California, United States
Alternative Lithographic Technologies VI
24 February 2014 | San Jose, California, United States
Alternative Lithographic Technologies V
25 February 2013 | San Jose, California, United States
Showing 5 of 7 published special sections
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