Dr. Benjamin Szu-Min Lin
Lithography Application at Cymer Southeast Asia Ltd
SPIE Involvement:
Publications (34)

Proceedings Article | 13 March 2012 Paper
R. Peng, I. Huang, H. Liu, H. J. Lee, John Lin, Arthur Lin, Allen Chang, Benjamin Szu-Min Lin, Ivan Lalovic
Proceedings Volume 8326, 83260X (2012) https://doi.org/10.1117/12.916420
KEYWORDS: Double patterning technology, Critical dimension metrology, Etching, Lithography, Optical lithography, Photomasks, Photoresist materials, Logic, Optical simulations, Cadmium

Proceedings Article | 4 March 2010 Paper
R. C. Peng, H. J. Lee, John Lin, Arthur Lin, Allen Chang, Benjamin Szu-Min Lin
Proceedings Volume 7640, 76402C (2010) https://doi.org/10.1117/12.846516
KEYWORDS: Critical dimension metrology, Optical lithography, Light sources, SRAF, Control systems, Logic, Logic devices, Laser applications, Reticles, Laser scanners

Proceedings Article | 10 December 2009 Paper
Proceedings Volume 7520, 752007 (2009) https://doi.org/10.1117/12.839488
KEYWORDS: Extreme ultraviolet, Tin, Extreme ultraviolet lithography, Reflectivity, Mirrors, Ions, Control systems, Lithography, Plasma, Coating

Proceedings Article | 13 March 2009 Paper
Proceedings Volume 7275, 72750T (2009) https://doi.org/10.1117/12.813448
KEYWORDS: Critical dimension metrology, Transistors, Lithography, Immersion lithography, Diffusion, Lens design, Design for manufacturability, Field programmable gate arrays, Design for manufacturing

Proceedings Article | 4 December 2008 Paper
R. Peng, Tony Wu, K. W. Chang, C. P. Yeh, H. Liu, H. Lee, John Lin, Allen Chang, Benjamin Lin
Proceedings Volume 7140, 714041 (2008) https://doi.org/10.1117/12.804616
KEYWORDS: Critical dimension metrology, Semiconducting wafers, Laser stabilization, Gas lasers, Signal processing, Beam controllers, Control systems, Laser applications, Lithography, Photoresist materials

Showing 5 of 34 publications
Conference Committee Involvement (3)
SPIE Lithography Asia - Korea
13 October 2010 | n/a, Republic of Korea
SPIE Lithography Asia - Taiwan
18 November 2009 | Taipei, Taiwan
SPIE Lithography Asia - Taiwan
4 November 2008 | Taipei, Taiwan
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