Dr. Benjamin D. Painter
R&D Engineer at Synopsys Inc
SPIE Involvement:
Publications (17)

Proceedings Article | 24 March 2017 Paper
Yudhishthir Kandel, Jonathan Chandonait, Lawrence Melvin, Sajan Marokkey, Qiliang Yan, Steven Grzeskowiak, Benjamin Painter, Gregory Denbeaux
Proceedings Volume 10143, 101430B (2017) https://doi.org/10.1117/12.2258063
KEYWORDS: Extreme ultraviolet lithography, Data modeling, Photoresist materials, Lithography, Optical proximity correction, Optical lithography, High volume manufacturing, Photons, Extreme ultraviolet, Semiconducting wafers, Electron beams, Scattering

Proceedings Article | 12 April 2013 Paper
Gerard Luk-Pat, Ben Painter, Alex Miloslavsky, Peter De Bisschop, Adam Beacham, Kevin Lucas
Proceedings Volume 8683, 868312 (2013) https://doi.org/10.1117/12.2011539
KEYWORDS: Metals, Photomasks, Printing, Optical lithography, Dielectrics, Etching, Lithography, Double patterning technology, Semiconducting wafers, Connectors

Proceedings Article | 13 March 2012 Paper
Proceedings Volume 8326, 83260D (2012) https://doi.org/10.1117/12.917986
KEYWORDS: Metals, Photomasks, Dielectrics, Optical lithography, Etching, Double patterning technology, Lithography, Photoresist materials, Capacitance, Tolerancing

Proceedings Article | 7 March 2012 Open Access Paper
Proceedings Volume 8327, 832703 (2012) https://doi.org/10.1117/12.920028
KEYWORDS: Optical lithography, Photomasks, Logic, Lithography, Double patterning technology, Etching, Immersion lithography, Cadmium sulfide, Metals, Dielectrics

Proceedings Article | 10 March 2010 Paper
Proceedings Volume 7640, 76401W (2010) https://doi.org/10.1117/12.848443
KEYWORDS: Atrial fibrillation, Optical proximity correction, Photomasks, Model-based design, Cadmium sulfide, Critical dimension metrology, Manufacturing, Printing, 3D modeling, Solids

Showing 5 of 17 publications
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