Benjamin Yong Park
Graduate Research Assistant at Univ of California Irvine
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 31, 2006
Proc. SPIE. 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
KEYWORDS: Microelectromechanical systems, Nanotechnology, Electronics, Microfluidics, BioMEMS, Electrodes, Particles, Silicon, Dielectrophoresis, Smart materials

PROCEEDINGS ARTICLE | May 20, 2004
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Carbon, Lithography, Electrodes, Particles, Dielectrophoresis, Photoresist materials, Atmospheric particles, Particle systems, Nanolithography, Liquids

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