Dr. Bernardo D. Aumond
Principal Engineer
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 2 June 2003 Paper
Proc. SPIE. 5038, Metrology, Inspection, and Process Control for Microlithography XVII
KEYWORDS: Atomic force microscopy, Statistical analysis, Deconvolution, Convolution, Metrology, Image processing, Interferometers, Scanning electron microscopy, Reconstruction algorithms, Image deconvolution

Proceedings Article | 21 June 2002 Paper
Proc. SPIE. 4626, Biomedical Nanotechnology Architectures and Applications
KEYWORDS: Lithography, Optical lithography, Chemistry, Proteins, Chemical elements, Self-assembled monolayers, Printing, Gold, Liquids, Polymers

Proceedings Article | 22 August 2001 Paper
Proc. SPIE. 4344, Metrology, Inspection, and Process Control for Microlithography XV
KEYWORDS: Statistical analysis, Lithium, Lutetium, Metrology, Atomic force microscopy, Convolution, Distortion, Image analysis, Inspection, Process control

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