Dr. Bernardo D. Aumond
Principal Engineer
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 2 June 2003
Proc. SPIE. 5038, Metrology, Inspection, and Process Control for Microlithography XVII
KEYWORDS: Metrology, Statistical analysis, Interferometers, Image processing, Atomic force microscopy, Scanning electron microscopy, Deconvolution, Convolution, Reconstruction algorithms, Image deconvolution

Proceedings Article | 21 June 2002
Proc. SPIE. 4626, Biomedical Nanotechnology Architectures and Applications
KEYWORDS: Gold, Lithography, Proteins, Optical lithography, Polymers, Chemistry, Printing, Chemical elements, Self-assembled monolayers, Liquids

Proceedings Article | 22 August 2001
Proc. SPIE. 4344, Metrology, Inspection, and Process Control for Microlithography XV
KEYWORDS: Metrology, Lithium, Statistical analysis, Inspection, Distortion, Image analysis, Atomic force microscopy, Process control, Convolution, Lutetium

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