Dr. Bernd Bodermann
at Physikalisch Technische Bundesanstalt
SPIE Involvement:
Conference Chair | Conference Program Committee | Author | Editor
Publications (57)

PROCEEDINGS ARTICLE | May 24, 2018
Proc. SPIE. 10678, Optical Micro- and Nanometrology VII
KEYWORDS: Visible radiation, Deep ultraviolet, Polarization, Etching, Spectroscopy, Chromium, Polarizers, Ion beams, Transmittance, Double patterning technology

SPIE Conference Volume | July 27, 2017

PROCEEDINGS ARTICLE | June 26, 2017
Proc. SPIE. 10330, Modeling Aspects in Optical Metrology VI
KEYWORDS: Oxides, Metrology, Polarization, Scattering, Silicon, Light scattering, Scatterometry, Uncertainty analysis, Optical metrology, Inverse problems, Finite element methods, Computational lithography, Critical dimension metrology, Nanolithography, Inverse optics, Nano optics, Maxwell's equations

PROCEEDINGS ARTICLE | November 2, 2015
Proc. SPIE. 9636, Scanning Microscopies 2015
KEYWORDS: Microscopes, Metrology, Data modeling, Opacity, Calibration, Manufacturing, Atomic force microscopy, Scanning electron microscopy, Dimensional metrology, Photomasks, Line width roughness, Critical dimension metrology, Standards development

PROCEEDINGS ARTICLE | August 20, 2015
Proc. SPIE. 9556, Nanoengineering: Fabrication, Properties, Optics, and Devices XII
KEYWORDS: Metrology, Calibration, X-rays, Silicon, Manufacturing, Atomic force microscopy, Scanning electron microscopy, Scatterometry, Critical dimension metrology, Standards development

SPIE Conference Volume | June 21, 2015

Showing 5 of 57 publications
Conference Committee Involvement (9)
Modeling Aspects in Optical Metrology VII
24 June 2019 | Munich, Germany
Modeling Aspects in Optical Metrology
26 June 2017 | Munich, Germany
Modeling Aspects in Optical Metrology V
23 June 2015 | Munich, Germany
Instrumentation, Metrology, and Standards for Nanomanufacturing VIII
20 August 2014 | San Diego, California, United States
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VII
28 August 2013 | San Diego, California, United States
Showing 5 of 9 published special sections
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top