Dr. Bernd Loechel
at Micro Resist Technology GmbH
SPIE Involvement:
Author
Publications (15)

PROCEEDINGS ARTICLE | August 20, 2015
Proc. SPIE. 9556, Nanoengineering: Fabrication, Properties, Optics, and Devices XII
KEYWORDS: Metrology, Calibration, X-rays, Silicon, Manufacturing, Atomic force microscopy, Scanning electron microscopy, Scatterometry, Critical dimension metrology, Standards development

PROCEEDINGS ARTICLE | May 15, 2014
Proc. SPIE. 9140, Photonics for Solar Energy Systems V
KEYWORDS: Thin films, Nanostructures, Photovoltaics, Crystals, Silicon, Thin film solar cells, Silicon films, Nanophotonics, Light harvesting, Absorption

PROCEEDINGS ARTICLE | May 1, 2014
Proc. SPIE. 9132, Optical Micro- and Nanometrology V
KEYWORDS: Diffraction, Metrology, Calibration, Silicon, Atomic force microscopy, Scanning electron microscopy, Scatterometry, Scatter measurement, Standards development, Diffraction gratings

PROCEEDINGS ARTICLE | September 25, 2013
Proc. SPIE. 8824, Next Generation (Nano) Photonic and Cell Technologies for Solar Energy Conversion IV
KEYWORDS: Glasses, Solar cells, Crystals, Silicon, Thin film solar cells, Silicon films, Solids, Sol-gels, Nanophotonics, Absorption

PROCEEDINGS ARTICLE | February 24, 2010
Proc. SPIE. 7609, Photonic and Phononic Crystal Materials and Devices X
KEYWORDS: Gold, Plasmonics, Nanoantennas, Waveguides, Polarization, Metals, Dielectrics, Silicon, Photonic crystals, Nanorods

PROCEEDINGS ARTICLE | February 18, 2010
Proc. SPIE. 7579, Laser Resonators and Beam Control XII
KEYWORDS: Confocal microscopy, Microscopes, Diamond, Microresonators, Resonators, Optical properties, Luminescence, Photonic crystals, Atomic force microscopy, Systems modeling

Showing 5 of 15 publications
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