Dr. Bernhard Flöter
at Laser-Lab Göttingen eV
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 3 May 2013
Proc. SPIE. 8778, Advances in X-ray Free-Electron Lasers II: Instrumentation
KEYWORDS: Monochromatic aberrations, Mirrors, Sensors, X-rays, Wavefront sensors, Wavefronts, Wave propagation, Beam propagation method, Free electron lasers, Alignment procedures

Proceedings Article | 1 April 2013
Proc. SPIE. 8679, Extreme Ultraviolet (EUV) Lithography IV
KEYWORDS: Monochromatic aberrations, Mirrors, Sensors, Wavefront sensors, Wavefronts, Wave propagation, Extreme ultraviolet, Extreme ultraviolet lithography, Free electron lasers, EUV optics

Proceedings Article | 21 May 2011
Proc. SPIE. 8078, Advances in X-ray Free-Electron Lasers: Radiation Schemes, X-ray Optics, and Instrumentation
KEYWORDS: Mirrors, Sensors, Wavefront sensors, Wavefronts, Wavefront aberrations, Wave propagation, Extreme ultraviolet, CCD image sensors, Free electron lasers, Wigner distribution functions

Proceedings Article | 23 March 2010
Proc. SPIE. 7636, Extreme Ultraviolet (EUV) Lithography
KEYWORDS: Gold, Mirrors, Multilayers, Silica, Silicon, Laser ablation, Extreme ultraviolet, Laser damage threshold, Plasma, Absorption

Proceedings Article | 31 December 2009
Proc. SPIE. 7504, Laser-Induced Damage in Optical Materials: 2009
KEYWORDS: Gold, Mirrors, Multilayers, Polymethylmethacrylate, Etching, Solids, Objectives, Extreme ultraviolet, EUV optics, Plasma

Showing 5 of 9 publications
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