Dr. Bernhard Kneer
Principal at Carl Zeiss SMT GmbH
SPIE Involvement:
Author
Publications (15)

Proceedings Article | 12 October 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Polarization, Sensors, Scanners, Lens design, Extreme ultraviolet lithography, High volume manufacturing, Polarization control

Proceedings Article | 19 March 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Modeling, Lithography, Imaging systems, Sensors, Scanners, Manufacturing, Lens design, Photomasks, Extreme ultraviolet lithography, Optical proximity correction

SPIE Journal Paper | 30 October 2017
JM3 Vol. 16 Issue 04
KEYWORDS: Photomasks, Scanners, Semiconducting wafers, Extreme ultraviolet, Extreme ultraviolet lithography, Lithography, Mirrors, Nanoimprint lithography, Projection systems, Wafer-level optics

Proceedings Article | 30 October 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Mirrors, Reticles, Imaging systems, Scanners, Reflectivity, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Nanoimprint lithography, Semiconducting wafers

Proceedings Article | 16 October 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Mirrors, Optical design, Reticles, Imaging systems, Projection systems, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers

Proceedings Article | 27 March 2017
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Modeling, Lithography, Sensors, Scanners, Manufacturing, Reflectivity, Lens design, Projection systems, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Optical proximity correction, Semiconducting wafers, EUV optics

Showing 5 of 15 publications
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