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Dr. Bernhard von Blanckenhagen
at Carl Zeiss Vision GmbH
SPIE Involvement:
Author
Publications (4)
SPIE Journal Paper | 1 June 2008
Reflectivity and surface roughness of multilayer-coated substrate recovery layers for EUV lithographic optics
Ileana Nedelcu, Robbert van de Kruijs, Andrey Yakshin, Bernhard von Blanckenhagen, Fred Bijkerk
OE, Vol. 47, Issue 06, 063801, (June 2008) https://doi.org/10.1117/12.10.1117/1.2939403
KEYWORDS: Multilayers, Reflectivity, Surface roughness, Silicon, Atomic force microscopy, Optical coatings, Extreme ultraviolet, EUV optics, X-rays, Scattering
Proceedings Article | 5 October 2005 Paper
Influence of the amorphous character of Al2O3 layers on their use in the deep UV spectral range
Proceedings Volume 5963, 59630K (2005) https://doi.org/10.1117/12.625203
KEYWORDS: Absorption, Aluminum, Crystals, Oxides, Plasma, Deep ultraviolet, Metals, Solids, Ions, Monte Carlo methods
Proceedings Article | 5 October 2005 Paper
Correlation between the optical performance of TiO2-Ag-TiO2 multilayers and the interface roughness between the layers
Proceedings Volume 5963, 596317 (2005) https://doi.org/10.1117/12.625193
KEYWORDS: Silver, Absorption, Interfaces, Multilayers, Ions, Dielectrics, Reflection, Reflectivity, Coating, Data modeling
Proceedings Article | 25 February 2004 Paper
Characterization of multilayer dielectric coatings by ellipsometry and x-ray grazing incidence reflectometry
Proceedings Volume 5250, (2004) https://doi.org/10.1117/12.513340
KEYWORDS: Data modeling, Multilayers, Optical coatings, Refractive index, Thin film coatings, X-rays, Ellipsometry, Grazing incidence, Reflectometry, Dielectrics
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