Prof. Bertrand Bocquet Profile

Prof. Bertrand Bocquet

at IEMN

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 23 December 2003 Paper

Design of silicon-PPTMDS bio-MEMS by cold RPECVD

Bertrand Bocquet, Nour-Eddine Bourzgui, Yannick Guhel, Vianney Mille, Celine Vivien, Philippe Supiot

Proceedings Volume 5345, (2003) https://doi.org/10.1117/12.530790

KEYWORDS: Polymers, Silicon, Microfluidics, Biosensors, Plasma, Microelectronics, Sensors, Extremely high frequency, Nitrogen, Deposition processes

Read Abstract +

An important activity is developed today in the field of biosensors and biochips. These sensors are used essentially in the detection and/or characterization of biological or chemical entities in complex media. The aim of this paper is the development of a new type of biosensors combining microfluidic components and millimeter or sub-millimeter wave (or THz or FIR) spectroscopy tools. Today, many different microsystems in the field of biology are realized in all polymers or in silicon with a bounding of silicon or glass. We have selected to deposit a Plasma Polymerized TetraMethylDiSiloxane (PPTMDS) on a silicon wafer. A new technological process based on cold remote nitrogen plasma allows us to obtain 50-80μm thick layers with a rigid texture and a very good link with silicon. This technological process is now well defined and is compatible with a classical microelectronic process for the deposition of the metallic planar waveguides. For the first time, measurements using an-in-house vectorial network analyzer (VNA) 140-220GHz are reported. Fairly good results have been obtained from impedance and propagation characteristics. These measurements allow us to determine the PPTMDS permittivity in this bandwidth. Thanks to this knowledge, we have designed a matched coplanar waveguide where a water droplet is deposited. An inversion model has been developed to retrieve the water permittivity and will be broadened to biological entities.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years