Dr. Bertrand Le-Gratiet
Senior Principal Engineer at STMicroelectronics SA
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Author
Publications (40)

Proceedings Article | 27 March 2020
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Analytics, Metrology, Optical lithography, Visualization, Image processing, Silicon, Doping, Scanning electron microscopy, Image quality, Process control, Optical proximity correction

Proceedings Article | 20 March 2020
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Lithography, Contamination, Etching, Scanners, Semiconducting wafers, Overlay metrology, Plasma

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Modeling, Metrology, Optical lithography, Data modeling, Silicon, Shape analysis, Machine learning, Semiconducting wafers, Process engineering, Chemical mechanical planarization

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Metrology, Optical lithography, Statistical analysis, Etching, Error analysis, Reliability, Control systems, Scanning electron microscopy, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Lithography, Reticles, Metrology, Logic, Scanners, Process control, Photomasks, Semiconducting wafers, Overlay metrology, Process engineering

Showing 5 of 40 publications
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