Dr. Bertrand Szelag
at CEA-LETI
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | March 14, 2018
Proc. SPIE. 10537, Silicon Photonics XIII
KEYWORDS: Optical lithography, Metals, Silicon, Laser processing, Semiconductor lasers, Photonic integrated circuits, Silicon photonics, Semiconducting wafers, Laser bonding, Hybrid silicon lasers

PROCEEDINGS ARTICLE | June 16, 2017
Proc. SPIE. 10249, Integrated Photonics: Materials, Devices, and Applications IV
KEYWORDS: Lithography, Photonic devices, Diffusion, Computing systems, Modulators, Telecommunications, Microelectronics, Silicon photonics, Electro optics, CMOS devices

PROCEEDINGS ARTICLE | April 28, 2017
Proc. SPIE. 10109, Optical Interconnects XVII
KEYWORDS: Transceivers, Electronics, Silicon, Semiconductor lasers, Integrated optics, Photonic integrated circuits, Silicon photonics, Chemical elements, Data communications, Hybrid silicon lasers

PROCEEDINGS ARTICLE | February 20, 2017
Proc. SPIE. 10108, Silicon Photonics XII
KEYWORDS: Oxides, Photodetectors, Optical lithography, Data modeling, Waveguides, Signal attenuation, Silicon, Photodiodes, Modulators, Silicon photonics, Electronic design automation, Microrings

PROCEEDINGS ARTICLE | May 13, 2016
Proc. SPIE. 9891, Silicon Photonics and Photonic Integrated Circuits V
KEYWORDS: Optical lithography, Waveguides, Etching, Germanium, Silicon, Modulators, Photomasks, Brain-machine interfaces, Silicon photonics, Semiconducting wafers

PROCEEDINGS ARTICLE | March 18, 2015
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Lithography, Optical lithography, Deep ultraviolet, Waveguides, Etching, Silicon, Photoresist materials, Wave propagation, Silicon photonics, 193nm lithography

Showing 5 of 6 publications
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