Ms. Beverly H. Cheung Profile

Beverly H. Cheung

Applications Engineer at Onto Innovation Inc

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Publications (3)

Proceedings Article | 12 May 2005 Paper

Characterization, modeling, and impact of scattered light in low-k1 lithography

Bruno La Fontaine, Yunfei Deng, Mircea Dusa, Alden Acheta, Anita Fumar-Pici, Harish Bolla, Beverly Cheung, Bhanwar Singh, Harry Levinson

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.601188

KEYWORDS: Modulation transfer functions, Scanners, Light scattering, Lithography, Spatial frequencies, Scatterometry, Critical dimension metrology, Computer simulations, Semiconducting wafers, Optical microscopes

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Proceedings Article | 10 May 2005 Paper

Application of optical CD for characterization of 70nm dense lines

Beverly Cheung, Mircea Dusa, Ton Kiers, Hugo Cramer

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.599896

KEYWORDS: Semiconducting wafers, Metrology, Critical dimension metrology, Lithography, Reticles, Wafer-level optics, Scanners, Photoresist materials, Reflectivity, Reflectometry

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Proceedings Article | 24 May 2004 Paper

OCD study of critical dimension and line-shape control of shallow-trench-isolation structures

Ye Feng, Xiaodong Zhang, Beverly Cheung, Zhuan Liu, Mita Isao, Manabu Hayashi

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.536582

KEYWORDS: Semiconducting wafers, Silicon, Critical dimension metrology, Photoresist materials, Finite element methods, Dysprosium, Process control, Etching, Semiconductors, Wafer-level optics

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