Dr. Bharat Kumar
at IBM Thomas J. Watson Research Ctr.
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 3 October 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Semiconductors, Oxides, Electron beam lithography, Optical lithography, Etching, Polymers, Interfaces, Semiconductor materials, Silicon, Head-mounted displays

Proceedings Article | 28 March 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Quartz, Polymers, Crystals, Interfaces, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography, Convolution, Photoresist developing, Standards development

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top