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Bharathi Bugata
at KLA Corp
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Author
Publications (2)
Proceedings Article | 25 October 2016 Paper
Reticle inspection equipment productivity increase using SEMI specification for reticle and pod management
Mark Wylie, Carl Hess, Ron Taylor, Jack Downey, Jeffrey Wood, Yen-Hung Lin, Bharathi Bugata, Dongsheng Fan
Proceedings Volume 9985, 99850L (2016) https://doi.org/10.1117/12.2241129
KEYWORDS: Reticles, Inspection, Inspection equipment, Factory automation, Manufacturing, High volume manufacturing, Control systems, Image processing, Semiconducting wafers, Roads
Proceedings Article | 27 May 2009 Paper
Increasing inspection equipment productivity by utilizing factory automation SW on TeraScan 5XX systems
Thomas Jakubski, Jan Lisowski, Ines Köhler, Bharathi Bugata, Jens Klobes, Michal Piechoncinski, Raphael Moses, Heiko Schmalfuss, Robert Fenske
Proceedings Volume 7470, 74700V (2009) https://doi.org/10.1117/12.835193
KEYWORDS: Inspection, Inspection equipment, Instrument modeling, Photomasks, Factory automation, Manufacturing, Reticles, System integration, Interfaces, Rule based systems
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