An optical MEMS (micro-electromechanical system) pressure sensor fabricated using bulk silicon micromachining
techniques and tested using single wavelength interrogation technique is presented here. The sensor described here was
designed for low pressure range applications. The operating principle of the sensor is Fabry-Perot (FP) interference.
Experimental results demonstrate that the sensor has reasonable linearity, sensitivity, low hysteresis and a very good
repeatability. Sensor’s response was found to be comparable with the theoretical predictions.