Bhimanadhuni R. KotiReddy
at Indian Institute of Technology Madras
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | October 14, 2003
Proc. SPIE. 5062, Smart Materials, Structures, and Systems
KEYWORDS: Oxides, Silica, Sensors, Etching, Crystals, Silicon, Oxygen, Semiconducting wafers, Wafer bonding, Surface finishing

PROCEEDINGS ARTICLE | October 14, 2003
Proc. SPIE. 5062, Smart Materials, Structures, and Systems
KEYWORDS: Sensors, Etching, Silicon, Resistance, Doping, Boron, Resistors, Semiconducting wafers, Temperature metrology, Wheatstone bridges

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