Dr. Bhooshan C. Popere
at DuPont Electronics & Imaging
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11609, Extreme Ultraviolet (EUV) Lithography XII
KEYWORDS: Lithography, Modulation, Imaging systems, Polymers, Quantum efficiency, Extreme ultraviolet, Yield improvement, Stochastic processes, Systems modeling, Absorption

Proceedings Article | 25 March 2019 Paper
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Chemical species, Polymers, Annealing, Ions, Silicon, Diffusion, Doping, Boron, Antimony, Polymer thin films

Proceedings Article | 25 March 2019 Paper
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Carbon, Etching, Polymers, Coating, Resistance, Chemical vapor deposition, Materials, 193nm lithography

Proceedings Article | 25 March 2019 Paper
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Semiconductors, Chemical species, Polymers, Annealing, Silicon, Coating, Doping, Boron, Semiconducting wafers, Polymer thin films

Proceedings Article | 13 March 2018 Paper
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Lithography, Etching, Dry etching, Polymers, Reflectivity, Ion implantation

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