Bikram Baidya
Engineering TD Manager at Intel Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 29 March 2013
Proc. SPIE. 8684, Design for Manufacturability through Design-Process Integration VII
KEYWORDS: Lithography, Detection and tracking algorithms, Metals, Manufacturing, Design for manufacturing, Photomasks, Double patterning technology, Overlay metrology, 193nm lithography, Design for manufacturability

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