Dr. Bilali Muhutijiang
at Univ of Science and Technology of China
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | October 31, 2016
Proc. SPIE. 10022, Holography, Diffractive Optics, and Applications VII
KEYWORDS: Diffraction, Holography, Etching, Dielectrics, Oxygen, Scanning electron microscopy, Photoresist materials, Ion beams, Photomasks, Diffraction gratings

SPIE Journal Paper | October 20, 2015
OE Vol. 54 Issue 10
KEYWORDS: Diffraction, Diffraction gratings, Photoresist materials, Gold, Optical design, Etching, Quartz, Photomasks, Photoresist developing, Ion beams

PROCEEDINGS ARTICLE | April 17, 2015
Proc. SPIE. 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII
KEYWORDS: Gold, Diffraction, Silica, Etching, Photoresist materials, Ion beams, Photomasks, Laser damage threshold, Photoresist developing, Diffraction gratings

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